Application Examples

High Quality in Confined Spaces

Spaces containing equipment, production processes, and inspection processes related to semiconductor, liquid crystal, solar panel, and related technologies demand high precision and high stability air processing. With the demands of such whole-area air processing, come extremely high associated expenses and maintenance costs.
ORION proposes a high precision air processing system that produces localized high quality air spaces, while utilizing the least amount of limited energy.

Delivered Installation Examples

Localized Air Conditioned Booth

Localized Air Conditioned Booth
Research Facility
Model: PAP20A-KR
Humidifier, Deionizer, PAP20A-KR (Inside Unit), Controller

Constant Temperature, Constant Humidity Room

Constant Temperature, Constant Humidity Room
Calibration and Inspection of Measurement Instruments
Model: PAP20A-KR, Incl. Plenum Chamber

Localized Air Conditioned Booth

Localized Air Conditioned Booth
Optics Research
Model: PAP20B1-W
All Fresh Specifications
Air flow control via blower fan inverter control and shutter.
Booth internal outlet port uses a sock filter.

Localized Precision Air processing

Localized Precision Air processing
Optical System Equipment
Model: PAP03B-SPR
All Fresh Specification, Built-In Drain Tank
Temperature control in 2 locations in the area from a single PAP unit.

Cleanroom Temperature Control

Cleanroom Temperature Control
Research Facility
Model: PAP40B-R
Includes a low-noise chamber on the intake port.
HEPA filter built-in.

Cleanroom Temperature Control

Cleanroom Temperature Control
Precision Air Processing for Plant Cultivation Room
Model: PAP20A-R
HEPA filter built-in.

Constant Temperature Booth

Constant Temperature Booth
For Research and Development
Model: PAP05A1
Uses sock duct at the air outlet in the booth.

Constant Temperature Room

Constant Temperature Room
For ultra precision processing research.
Model: PAP40B-W
Outlet temperature precision: ±0.05 °C spec.

Engine Bench Testing

Engine Bench Testing
Model: PAP40B-W
Incl. vibration reducing base.

Low Humidity Air Control

Low Humidity Air Control
Semi-dry room for raw material research and development.
Model: PAP20A-F

Constant Temperature Room

Constant Temperature Room
For precision production.
Model: PAP40B-W

Constant Temperature Laboratory

Constant Temperature Laboratory
For pre-shipping inspection room.
Model: PAP40C-R

Constant Temperature, Constant Humidity Room

Constant Temperature, Constant Humidity Room
For PCB inspection.
Custom built-to-order item.

Constant Temperature Room

Constant Temperature Room
3D printer room.
Model: PAP40C-R

Constant Temperature and Constant Humidity Clean Room

Constant Temperature and Constant Humidity Clean Room
For cleanroom used in precision thermoelectric equipment assembly process.
Model: PAP80B-KR
Rear intake unit spec.

Constant Temperature, Constant Humidity Room

Constant Temperature, Constant Humidity Room
For equipment evaluation testing and measurement.
Model: PAP40C-KR
Example of inset installation of a precision air processor into an insulated paneled opening.

Application Examples

Localized Air Processing for all Kinds of Equipment

Photolithography Equipment (Stepper)

Photolithography Equipment (Stepper)

Using photolithography equipment, electrode patterns on the scale of 10s to 1000s of nm are imprinted onto silicon or glass substrate, and air processing is required that can handle extremely high levels of temperature control, humidity control, and cleanliness.

Spin Coater

Spin Coater

A spin coater is used in the semiconductor manufacturing process to apply a resist fluid to a wafer that has undergone deposition and is also used in the production of optical recordable discs such as CDs, DVDs, BDs, etc. in order to apply the recordable layer to the disc. When doing so, the scale of the recording layer applied is in the order of nano units, and when making the very uniform layer which is required, any changes in viscosity due to changes in temperature and humidity can spell disaster. It is vital to plan for constant temperature and humidity management, as well as stability in quality.

Precision Temperature Control for Liquid Crystal Glass Substrates

Precision Temperature Control for Liquid Crystal Glass Substrates

During the liquid crystal manufacturing process, temperature changes can result in expansion, contraction, and electrostatic formation on the substrate. In order to avoid trouble arising from such issues, temperature, or possibly temperature and humidity of the working environment must be precisely controlled.

Solder Paste Printer (Screen Printer)

Solder Paste Printer (Screen Printer)

A solder paste printer applies solder paste to a printed circuit board. In the screen printing process, a metal mask of approximately 100 to 300 microns in thickness is commonly used through which solder paste is passed to be applied to the board. Powdered solder is mixed in flux so that a moderate viscosity is formed. However, the effects of temperature can prevent proper application. Also, depending on the humidity, electrostatic formation can also occur. For these reasons, temperature and humidity management are necessary.

Solar Simulator

Solar Simulator

Testing apparatus for evaluation of solar cell specifications by exposure to artificial sunlight. Temperature management is required to keep down heat from light sources in order to make stable conditions for measurement.

Precision Processing Machine

Precision Processing Machine

With current ultraprecision machine tools, sizes down to the sub-micron order are the norm, and there is a demand for nano-unit scales. The smallest changes in temperature can result in expansion and contraction of equipment and the target work, so there is always the desire for absolute temperature control precision.

Printed Circuit Board Stocker

Printed Circuit Board Stocker

Printed circuit boards must be kept at a uniform temperature and humidity throughout manufacturing processes before solder paste printing. Printed circuit boards have poor thermal properties, so management of storage temperature can reduce lower yields due to poor soldering, and is effective at increasing quality.

Electron Microscope

Electron Microscope

Electron microscope resolutions are at a level of 0.1 nm, and such a working environment demands a uniform range of temperature and humidity. In order to achieve more reliable, higher analytical results, better prepared environmental conditions are indispensable.

Tablet Press

Tablet Press

Presently, "powder processing technology", which is the means to process powder into an easy to handle shape, has become vital for all industries. A tablet press (also known as a "tableting machine") solidifies a powder by means of a kind of molding machine, and the internals of such equipment require an environment with a constant temperature and low humidity.

3-D Measuring Instrument

3-D Measuring Instrument

3-D measuring instruments require a minimum high-accuracy scale of 0.0005 to 0.00001 mm. Improvement of measurement accuracy demands a stable installation environment.

Chromatograph

Chromatograph

Chromatograph equipment measures the respective constituent contents of a sample.
Measurement sensitivity on the order of PPM (parts per million) to PPQ (parts per quadrillion: 1 / 1x10¯¹⁵) and is particularly used in bio-chemistry, pharmaceuticals, food-related applications. More reliable, higher quality results come about with high level improvements to the working environment.

Liquid Dispensing (Pipetting) Equipment

Liquid Dispensing (Pipetting) Equipment

Liquid dispensing equipment is widely used in the fields of biology, chemistry, and medicine. Improved precision can be achieved through temperature and humidity management.

Electronic Balance

Electronic Balance

Presently, mass measurement in analytical chemistry is generally done using the electronic balance.
Proper environmental management can prevent the subtle changes that may arise from fluctuating temperature and humidity, and as a result, more stable measurement results can be achieved.

Fume Hood

Fume Hood

A fume hood provides internal temperature and humidity management of intake air.