Application Examples

Using photolithography equipment, electrode patterns on the scale of 10s to 1000s of nm are imprinted onto silicon or glass substrate, and air processing is required that can handle extremely high levels of temperature control, humidity control, and cleanliness.

A spin coater is used in the semiconductor manufacturing process to apply a resist fluid to a wafer that has undergone deposition and is also used in the production of optical recordable discs such as CDs, DVDs, BDs, etc. in order to apply the recordable layer to the disc. When doing so, the scale of the recording layer applied is in the order of nano units, and when making the very uniform layer which is required, any changes in viscosity due to changes in temperature and humidity can spell disaster. It is vital to plan for constant temperature and humidity management, as well as stability in quality.

During the liquid crystal manufacturing process, temperature changes can result in expansion, contraction, and electrostatic formation on the substrate. In order to avoid trouble arising from such issues, temperature, or possibly temperature and humidity of the working environment must be precisely controlled.

A solder paste printer applies solder paste to a printed circuit board. In the screen printing process, a metal mask of approximately 100 to 300 microns in thickness is commonly used through which solder paste is passed to be applied to the board. Powdered solder is mixed in flux so that a moderate viscosity is formed. However, the effects of temperature can prevent proper application. Also, depending on the humidity, electrostatic formation can also occur. For these reasons, temperature and humidity management are necessary.

Testing apparatus for evaluation of solar cell specifications by exposure to artificial sunlight. Temperature management is required to keep down heat from light sources in order to make stable conditions for measurement.

With current ultraprecision machine tools, sizes down to the sub-micron order are the norm, and there is a demand for nano-unit scales. The smallest changes in temperature can result in expansion and contraction of equipment and the target work, so there is always the desire for absolute temperature control precision.

Printed circuit boards must be kept at a uniform temperature and humidity throughout manufacturing processes before solder paste printing. Printed circuit boards have poor thermal properties, so management of storage temperature can reduce lower yields due to poor soldering, and is effective at increasing quality.

Electron microscope resolutions are at a level of 0.1 nm, and such a working environment demands a uniform range of temperature and humidity. In order to achieve more reliable, higher analytical results, better prepared environmental conditions are indispensable.

Presently, "powder processing technology", which is the means to process powder into an easy to handle shape, has become vital for all industries. A tablet press (also known as a "tableting machine") solidifies a powder by means of a kind of molding machine, and the internals of such equipment require an environment with a constant temperature and low humidity.

3-D measuring instruments require a minimum high-accuracy scale of 0.0005 to 0.00001 mm. Improvement of measurement accuracy demands a stable installation environment.

Chromatograph equipment measures the respective constituent contents of a sample.
Measurement sensitivity on the order of PPM (parts per million) to PPQ (parts per quadrillion: 1 / 1x10¯¹⁵) and is particularly used in bio-chemistry, pharmaceuticals, food-related applications. More reliable, higher quality results come about with high level improvements to the working environment.

Liquid dispensing equipment is widely used in the fields of biology, chemistry, and medicine. Improved precision can be achieved through temperature and humidity management.

Presently, mass measurement in analytical chemistry is generally done using the electronic balance.
Proper environmental management can prevent the subtle changes that may arise from fluctuating temperature and humidity, and as a result, more stable measurement results can be achieved.

A fume hood provides internal temperature and humidity management of intake air.